Fabrication of high mobility poly-Si TFT using Blue-Multi-Laser-Diode Annealing

Ｋｏｕｙａ Ｓｕｇｉｈａｒａ

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[19a-E14-1~10] 13.3 Si Process・Interconnect・MEMS・Integration

Wed. Mar 19, 2014 9:00 AM - 11:45 AM E14 (E302)

9:45 AM - 10:00 AM

△ [19a-E14-4] Fabrication of high mobility poly-Si TFT using Blue-Multi-Laser-Diode Annealing

ＫｏｕｙａＳｕｇｉｈａｒａ¹, ＫｉｙｏｈａｒｕＳｈｉｍｏｄａ¹, ＴａｔｓｕｙａＯｋａｄａ¹, ^○ＴａｋａｓｈｉＮｏｇｕｃｈｉ¹, ＴａｋａｈｉｒｏＭｉｙａｓｈｉｔａ², ＹｕｔａｋａＫｕｓｕｄａ², ＳｈｉｎｉｃｈｉＭｏｔｏｙａｍａ² (Univ. of the Ryukyus¹, SAMCO Inc.²)

Keywords:TFT,Poly Si,BLDA