[19a-F6-1~6] 8.4 Plasma etching

[19a-F6-1] Real-time / in-situ electron spin resonance analysis of surface reactions of poly(methyl-methacrylate) during plasma processes

^○（PC）Yudai Miyawaki¹, Haoran Wang¹, Kenji Ishikawa¹, Yusuke Kondo¹, Keigo Takeda¹, Hiroki Kondo¹, Hideo Horibe², Makoto Sekine¹, Masaru Hori¹ (Nagoya Univ.¹, Osaka City Univ.²)

Keywords:電子スピン共鳴法