[19a-F8-1~12] 5.3 Optical Control

[19a-F8-3] Vertical Light Coupling Between Silicon Vertically-Curved Waveguide and Optical Fiber

^○Tomoya Yoshida¹, Ryohei Takei¹, Takashi Nishi¹, Shougo Tajima², Emiko Omoda¹, Masayoshi Nagao¹, Noboru Miura², Masahiko Mori², Youichi Sakakibara^1,2 (AIST¹, Meiji Univ.²)

Keywords:シリコン細線導波路,ウエハ検査,光配線