[19a-F8-1~12] 5.3 Optical Control

[19a-F8-2] Ultralow-loss Hydrogenated Amorphous Silicon Waveguide

^○Ryohei Takei^1,2, Shoko Manako^1,2, Emiko Omoda^1,2, Masao Suzuki^1,2, Masahiko Mori^1,2, Youichi Sakakibara^1,2, Toshihiro Kamei^1,2 (AIST¹, PECST²)

Keywords:アモルファスシリコン,シリコンフォトニクス,光導波路