[19a-PA4-1~12] 8.3 Plasma deposition of thin film and surface treatment

▼ [19a-PA4-7] Evaluation of amine functionalities bound on the ZnO surface by plasma processing used for biomolecule detection

^○Mihai Ciolan¹, Iuliana Motrescu², Dumitru Luca³, Masaaki Nagatsu¹ (Shizuoka University GSST¹, Shizuoka University RIE², Al.I Cuza University Iasi Romania³)

Keywords:zinc oxide,plasma functionalization,amine groups