[19a-PG1-1~10] 6.2 Carbon-based thin films

[19a-PG1-2] Characterization of a-C: H Thin Films Fabricated by Low-energy Electron Beam Irradiation on Solid Thin Films of Benzene at Cryogenic Temperature

^○Takashi Saito¹, Haruka Soga¹, Naoki Kobayashi¹, Tetsuya Sato¹ (Univ. of Yamanashi¹)

Keywords:アモルファスカーボン,ベンゼン,極低温