The 61st JSAP Spring Meeting, 2014

Presentation information

Print

Poster presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[19a-PG1-1~10] 6.2 Carbon-based thin films

Wed. Mar 19, 2014 9:30 AM - 11:30 AM PG1 (G棟2階)

9:30 AM - 11:30 AM

[19a-PG1-5] Effects of the hydrogen flow in the carbon nitride deposition using microwave plasma CVD

○yusuke Takahashi1, Hitoe Habuchi1, Hirofumi Takikawa2 (Gifu Natl. coll. Technol.1, Toyohashi Univ. Technol.2)

Keywords:窒化炭素