[19a-PG1-1~10] 6.2 Carbon-based thin films

△ [19a-PG1-4] Evaluation of Electrical Conductivity of Iodine doped a-C:H Films

^○So Maeara¹, Kazuki Kouchi¹, Masaaki Yamazato¹, Akira Higa¹ (University of the Ryukyus¹)

Keywords:水素化アモルファス炭素薄膜,ヨウ素ドーピング,電気伝導率