The 61st JSAP Spring Meeting, 2014

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Poster presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[19a-PG1-1~10] 6.2 Carbon-based thin films

Wed. Mar 19, 2014 9:30 AM - 11:30 AM PG1 (G棟2階)

9:30 AM - 11:30 AM

[19a-PG1-3] Characterization of Diamond-Like Carbon Films by RF Plasma CVD from CO Gas

○（B）Yuki Yasuoka1, Toru Harigai1, Hiroshi Furuta1,2, Akimitsu Hatta1,2, Tsuneo Suzuki3, Hidetoshi Saitoh3 (Kochi Univ. Technol.1, Inst. Nanotechnol., Kochi Univ. Technol.2, Nagaoka Univ. Technol.3)

Keywords:一酸化炭素ガス,高周波プラズマ,炭素膜