[19p-D1-1~20] 4.7 Laser processing

[19p-D1-19] Diagnostics of ablation plume generated with laser-driven Extreme ultraviolet (EUV) light

^○Masaya Masuda¹, Nozomi Tanaka¹, Kensuke Nagatomi², Minoru Yoshida², Atsushi Sunahara³ (Osaka Univ.Institute of Laser Engineering¹, Kinki Univ.Faculy of Science and Engineering², Institute for Laser Technology³)

Keywords:EUV,アブレーション,プラズマ加熱