[19p-D1-1~20] 4.7 Laser processing

[19p-D1-20] Ablation of Silica Glass Using Laser Plasma Soft X-rays

^○Torii Shuichi¹, Makimura Tetsuya¹, Niino Hiroyuki², Murakami Kouichi¹ (Inst. of Applied Physics, Univ. of Tsukuba¹, AIST²)

Keywords:軟Ｘ線, シリカガラス, アブレーション