The 61st JSAP Spring Meeting, 2014

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06. Thin Films and Surfaces » 6.4 New thin-film materials

[19p-D6-1~18] 6.4 New thin-film materials

Wed. Mar 19, 2014 1:45 PM - 6:30 PM D6 (D209)

4:00 PM - 4:15 PM

△ [19p-D6-10] Fabrication of TiH2 thin films by pulsed-laser deposition

○Takayuki Suzuki1, Kohei Yoshimatsu1, Nobuo Tsuchimine2, Takayoshi Ohshima1, Akira Ohtomo1,3,4 (Tokyo Institute of Technology1, TOSHIMA Manufacturing Co.2, MCES3, JST-ALCA4)

Keywords:パルスレーザ堆積法,水素化物,チタン