The 61st JSAP Spring Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[19p-D6-1~18] 6.4 New thin-film materials

Wed. Mar 19, 2014 1:45 PM - 6:30 PM D6 (D209)

2:15 PM - 2:30 PM

▼ [19p-D6-3] Improvement of Electrical Properties of InGaZnO Thin-Film Transistors by Fluorinated Silicon Nitride Passivation

○（D）jingxin Jiang1, Tatsuya Toda1, Mamoru Furuta1 (Kochi Univ. of Tech.1)

Keywords:Thin-film transistor