[19p-D6-1~18] 6.4 New thin-film materials

△ [19p-D6-6] Yttrium Oxide Epitaxial Thin Films Grown Under Reductive Condition

^○Kenichi Kaminaga¹, Ryosuke Sei¹, Tomoteru Fukumura^1,2, Tetsuya Hasegawa^1,2 (Univ. Tokyo¹, JST-CREST²)

Keywords:パルスレーザ堆積法,Yttrium Oxide,イットリウム酸化物