[19p-D8-1~13] 14.3 Electron devices and Process technology

△ [19p-D8-7] Mapping of thermal degradation of n-GaN Schottky diodes using scanning internal photoemission microscopy

^○Shingo Yamamoto¹, Yuhei Kihara¹, Kenji Shiojima¹ (Univ. of Fukui¹)

Keywords:GaN,ショットキー接触,二次元評価