[19p-D9-1~18] 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

△ [19p-D9-1] Ab initio analysis on the stability of metal atoms in β-Si3N4/Si structure

^○（M1）Daiki Shibata¹, Syunsuke Kobayashi¹, Koji Sueoka¹, Jun Komachi², Koichiro Saga² (Okayama Pref. Univ.¹, SONY Corp.²)

Keywords:β-Si3N4/Si界面構造,第一原理解析,金属不純物