The 61st JSAP Spring Meeting, 2014

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13. Semiconductors A (Silicon) » 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

[19p-D9-1~18] 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

Wed. Mar 19, 2014 2:00 PM - 7:00 PM D9 (D315)

4:15 PM - 4:30 PM

▲ [19p-D9-9] Spatial Variation in Carrier Concentration in Nanocrystal Ni-Si Films Measured by Multimode Scanning Probe Microscopy

○Leonid Bolotov1,2, Noriyuki Uchida2, Tetsuya Tada2, Toshihiko Kanayama2 (University of Tsukuba [Univ. of Tsukuba]1, Advanced Industrial Science and Technology [AIST]2)

Keywords:ナノ結晶膜,ﾌﾟﾛｰﾌﾞ顕微鏡