[19p-D9-1~18] 13.1 基礎物性・表面界面現象・シミュレーション

▲ [19p-D9-9] Spatial Variation in Carrier Concentration in Nanocrystal Ni-Si Films Measured by Multimode Scanning Probe Microscopy

^○LeonidBolotov^1,2，内田紀行²，多田哲也²，金山敏彦² (筑波大¹，産総研²)

キーワード：ナノ結晶膜,ﾌﾟﾛｰﾌﾞ顕微鏡