[19p-E12-1~19] 16.3 Bulk, thin-film and other silicon-based solar cells

[19p-E12-17] Preparation of Si solar cells using ARC layer by non-vacuum method

^○Norihisa Harano¹, Abdullah Uzum¹, Yasuaki Ishikawa², Yasuharu Uraoka², Seiya Yoshinaga², Tomitarou Harada³, Yutaka Kimura⁴, Kenji Tanimoto⁴, Seigo Ito¹ (Univ. of Hyogo¹, NAIST², Daiwa Sangyo Co. Ltd.³, Nissan Chemical Industries ltd.⁴)

Keywords:反射防止膜,スプレー熱分解法