[19p-E13-1~17] Materials science of singularity in nitride semiconductors -growth, fabrication, creation of new functions-

▲ [19p-E13-16] Crystal domain microstructure analysis of a thick AlN film grown on a trench-patterned AlN/sapphire template by asymmetric X-ray microdiffraction

^○（D）Khan Dinh¹, Shotaro Takeuchi¹, Kunihiko Nakamura¹, Takuji Arauchi¹, Yoshiaki Nakamura¹, Hideto Miyake², Kazumasu Hiramatsu², Yasuhiko Imai³, Shigeru Kimura³, Akira Sakai¹ (Osaka University¹, Mie University², SPring-8³)

Keywords:X-ray microdiffrection,Trench-patterned AlN,Crystal domain