[19p-E13-1~17] 窒化物半導体特異構造の科学　〜成長・作製と新機能の発現〜

▲ [19p-E13-16] Crystal domain microstructure analysis of a thick AlN film grown on a trench-patterned AlN/sapphire template by asymmetric X-ray microdiffraction

^○（D）Khan Dinh¹，Shotaro Takeuchi¹，Kunihiko Nakamura¹，TakujiArauchi¹，YoshiakiNakamura¹，HidetoMiyake²，Kazumasu Hiramatsu²，Yasuhiko Imai³，Shigeru Kimura³，Akira Sakai¹ (Osaka University¹，Mie University²，SPring-8³)

キーワード：X-ray microdiffrection,Trench-patterned AlN,Crystal domain