The 61st JSAP Spring Meeting, 2014

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13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[19p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

Wed. Mar 19, 2014 1:15 PM - 6:45 PM E14 (E302)

1:15 PM - 1:30 PM

[19p-E14-1] Process Integration of MOSFETs Fabricated by Full MINIMAL Equipment

○Fumito Imura1, Kazuhiro Koga1, Hitoshi Asano1, Sommawan Khumpuang1,2, Shiro Hara1,2 (MINIMAL1, AIST2)

Keywords:ミニマルファブ