The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[19p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

Wed. Mar 19, 2014 1:15 PM - 6:45 PM E14 (E302)

3:30 PM - 3:45 PM

[19p-E14-10] Formation of slip dislocation by rapid heating in minimal heating equipment

Haruki Toonoe1, Takashi Yajima1, Yuuki Ishida1,2, Shinichi Ikeda1,2, Sommawan Khumpuang1,2, Shiro Hara1,2 (MIMINAL1, AIST2)

Keywords:スリップ転位