The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[19p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

Wed. Mar 19, 2014 1:15 PM - 6:45 PM E14 (E302)

3:15 PM - 3:30 PM

[19p-E14-9] Superimposing accuracy in Minimal Mask-less Exposure System

Yuuji Kitayama1, Yousuke Tanaka1,2, Ryouichi Irita1,2, Kenji Miyake1,2, Sommawan Khumpuang1,3, Shiro Hara1,3 (MINIMAL1, PMT2, AIST3)

Keywords:ミニマルファブ