[19p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

[19p-E14-4] Cleanroom-Free Minimal Air Circulation System for PLAD (II)

^○Takashi Yajima¹, Masaharu Yasui¹, Sommawan Khumpuang^1,2, Hitoshi Maekawa^1,2, Shiro Hara^1,2 (MINIMAL¹, AIST²)

Keywords:minimal　fab