[19p-E14-1~21] 13.3 Si Process・Interconnect・MEMS・Integration

[19p-E14-5] Development of Wafer Transfer System for Vacuum Process in the Minimalfab

^○Hitoshi Maekawa^1,3, Shinichi Imai^2,3, Sommawan Khumpuang^1,3, Shiro Hara^1,3 (AIST¹, TAZMO², MINIMAL³)

Keywords:ミニマルファブ