[19p-E8-1~21] 6.3 Oxide-based electronics

[19p-E8-9] Characterization of NiO thin films by a reactive-sputtering method with a pair of facing Ni targets

^○（M1）yasuaki furuya¹, mai kawai², tokahiro nomoto², nozomu tsuboi^2,3 (Grad. School of Sci. and Tech., Niigata Univ.¹, Fac. of Eng., Niigata Univ.², Cen. for Trans. Research, Niigata Univ.³)

Keywords:透明導電性酸化物