[19p-F12-1~20] 13.4 Devices/Integration Technologies

[19p-F12-1] Experimental Study on 2D-Si Layers for Future Several-nm CMOS (Ⅵ)

^○Yuusuke Nagata¹, Yuuta Nakahara¹, Yuuya Suzuki¹, Kengo Saita¹, Yuuki Nagamine¹, Takashi Aoki¹, Toshiyuki Sammejima², Tomohisa Mizuno¹ (Kanagawa Univ¹, Tokyo Univ. Agri. Tech²)

Keywords:2次元Si,ラマン,フォトルミネッセンス