[19p-F6-1~18] 8.4 Plasma etching

△ [19p-F6-5] Mechanism of Generating Active Species and Etch Reaction in CHxFy Plasma (IV)

^○（DC）Yusuke Kondo¹, Yudai Miyawaki¹, Keigo Takeda¹, Hiroki Kondo¹, Satomi Tajima¹, Kenji Ishikawa¹, Toshio Hayashi¹, Makoto Sekine¹, Masaru Hori¹ (Nagoya Univ.¹)

Keywords:エッチング,ハイドロフルオロカーボン,プラズマ診断