[19p-F6-1~18] 8.4 Plasma etching

△ [19p-F6-7] Mechanism of plasma etching on gallium nitride at high temperature (4)

^○（M2）Zecheng Liu¹, Takashi Kako¹, Kenji Ishikawa¹, Osamu Oda¹, Keigo Takeda¹, Hiroki Kondo¹, Makoto Sekine¹, Masaru Hori¹ (Nagoya Univ.¹)

Keywords:エッチング,チッカガリウム