The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

15. Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[19p-F9-1~17] 15.8 Crystal evaluation, impurities and crystal defects

Wed. Mar 19, 2014 1:00 PM - 5:45 PM F9 (F401)

4:30 PM - 4:45 PM

[19p-F9-13] Effects of Light Element Ion Beam Implantation on Transition Metal Impurities Proximity Gettering of Silicon Wafers

Yoshihiro Koga1, Kazunari Kurita1, Hidehiko Okuda1, Takeshi Kadono1, Ryousuke Okuyama1, Takurou Iwanaga1 (SUMCO CORPORATION1)

Keywords:近接ゲッタリング,イオン注入,シリコンウェーハ