[19p-F9-1~17] 15.8 Crystal evaluation, impurities and crystal defects

[19p-F9-13] Effects of Light Element Ion Beam Implantation on Transition Metal Impurities Proximity Gettering of Silicon Wafers

^○Yoshihiro Koga¹, Kazunari Kurita¹, Hidehiko Okuda¹, Takeshi Kadono¹, Ryousuke Okuyama¹, Takurou Iwanaga¹ (SUMCO CORPORATION¹)

Keywords:近接ゲッタリング,イオン注入,シリコンウェーハ