The 61st JSAP Spring Meeting, 2014

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15. Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[19p-F9-1~17] 15.8 Crystal evaluation, impurities and crystal defects

Wed. Mar 19, 2014 1:00 PM - 5:45 PM F9 (F401)

5:00 PM - 5:15 PM

[19p-F9-15] A Considerations of 300mm Silicon Wafer for Power Devices

○Hidekazu Yamamoto1 (Chiba Inst. of Tech.1)

Keywords:パワーデバイス,シリコン