The 61st JSAP Spring Meeting, 2014

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15. Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[19p-F9-1~17] 15.8 Crystal evaluation, impurities and crystal defects

Wed. Mar 19, 2014 1:00 PM - 5:45 PM F9 (F401)

2:15 PM - 2:30 PM

[19p-F9-6] Diffusivity of Oxygen Enhanced by Boron in Silicon Crystals

○Kazuhisa Torigoe1, Jun Fujise1, Toshiaki Ono1, Nakamura Kozo1 (SUMCO CORP.1)

Keywords:シリコン,酸素,拡散