Relation between CZ Silicon Lattice Spacing And It's Oxygen Concentration

Presentation information

Oral presentation

15. Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

Wed. Mar 19, 2014 1:00 PM - 5:45 PM F9 (F401)

2:45 PM - 3:00 PM

Xiaowei ZHANG¹, ^○Takao Abe², Hiroyuki Fujimoto³ (PF¹, Isobe R&D², AIST³)

Keywords:酸素濃度,格子間隔,CZシリコン