The 61st JSAP Spring Meeting, 2014

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Poster presentation

01. Applied Physics in General » 1.3 Novel Technologies and Frontier Engineering Science

[19p-PA2-1~9] 1.3 Novel Technologies and Frontier Engineering Science

Wed. Mar 19, 2014 4:00 PM - 6:00 PM PA2 (アリーナ)

4:00 PM - 6:00 PM

[19p-PA2-4] Measurement of the X-ray production range in Copper by EDX analysis using the multilayer film structure

○Mina Sato1, Akihiro Matsutani1, Masato Sone2 (Tokyo Tech. Semiconductor and MEMS Processing Center1, Tokyo Tech. P&I Laboratory2)

Keywords:X線