Fabrication of an antenna coupled VO<sub>x</sub> micro-bolometer detector on membrane by MOD

Presentation information

Poster presentation

01. Applied Physics in General » 1.3 Novel Technologies and Frontier Engineering Science

Wed. Mar 19, 2014 4:00 PM - 6:00 PM PA2 (アリーナ)

4:00 PM - 6:00 PM

^○Akihito Matsushita¹, Takashi Tachiki¹, Takashi Uchida¹ (NDA¹)

Keywords:テラヘルツ