The 61st JSAP Spring Meeting, 2014

Presentation information

Print

Poster presentation

01. Applied Physics in General » 1.3 Novel Technologies and Frontier Engineering Science

[19p-PA2-1~9] 1.3 Novel Technologies and Frontier Engineering Science

Wed. Mar 19, 2014 4:00 PM - 6:00 PM PA2 (アリーナ)

4:00 PM - 6:00 PM

[19p-PA2-7] Alignment method for flexible substrate using DMD Reticle free Exposure equipment

○Mitsunori Tone1, Satoshi Yokoyama2, Hiroshi Kubota1, Masao Yoshioka2 (Graduate School of Science and Technology Kumamoto Univ.1, Kumamoto Univ.2)

Keywords:アライメント,alignment