The 61st JSAP Spring Meeting, 2014

Presentation information

Poster presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[19p-PG3-1~32] 13.3 Si Process・Interconnect・MEMS・Integration

Wed. Mar 19, 2014 4:00 PM - 6:00 PM PG3 (G棟2階)

4:00 PM - 6:00 PM

[19p-PG3-11] Low-Temperature CLC Poly-Si TFTs with Sputtered Al2O3 Gate Dielectric Layer

Tatsuya Meguro1, Daiki Chida1, Akito Hara1 (Tohoku Gakuin Univ.1)

Keywords:TFT