[19p-PG3-1~32] 13.3 Si Process・Interconnect・MEMS・Integration

[19p-PG3-18] Observation of Grain Growth by Micro-Thermal-Plasma-Jet Crystallization of Amorphous Silicon Strips

^○（DC）Shohei Hayashi^1,2, Seiji Morisaki¹, Takahiro Kamikura¹, Shogo Yamamoto¹, Taichi Nakatani¹, Seiichiro Higashi¹ (Hiroshima Univ.¹, JSPS Research Fellow DC²)

Keywords:シリコン,熱プラズマジェット,結晶成長