[19p-PG3-1~32] 13.3 Si Process・Interconnect・MEMS・Integration

[19p-PG3-2] A Dual-Axis MEMS Sensor for An Arrayed MEMS Accelerometer

^○Takaaki Matsushima¹, Toshifumi Konishi¹, Daisuke Yamane², Hiroyuki Ito², Noboru Ishihara², Hiroshi Toshiyoshi³, Katsuyuki Machida^1,2, Kazuya Masu² (NTT-AT¹, Tokyo Inst. of Tech.², The Univ. of Tokyo³)

Keywords:MEMS,加速度センサ,Accelerometer