[19p-PG3-1~32] 13.3 Si Process・Interconnect・MEMS・Integration

[19p-PG3-4] A Study on an Energy Harvesting Device (3)

^○Toshifumi Konishi¹, Ken Kagaya², Daisuke Yamane², Takaaki Matsushima¹, Hiroyuki Ito², Noboru Ishihara², Kazuya Masu², Katsuyuki Machida^1,2, Hiroshi Toshiyoshi³ (NTT-AT¹, Tokyo Tech.², Univ. of Tokyo³)

Keywords:MEMS,Energy Harvesting,マルチフィジクスシミュレーション