[19p-PG3-1~32] 13.3 Si Process・Interconnect・MEMS・Integration

[19p-PG3-3] A Study on an Energy Harvesting Device(2)

^○Ken Kagaya¹, Toshifumi Konishi², Daisuke Yamane¹, Takaaki Matsushima², Hiroyuki Ito¹, Noboru Ishihara¹, Hiroshi Toshiyoshi³, Katsuyuki Machida^1,2, Kazuya Masu¹ (Tokyo Inst. of Tech.¹, NTT-AT², The Univ. of Tokyo³)

Keywords:MEMS,エネルギーハーベスティング,Energy Harvesting