[19p-PG3-1~32] 13.3 Si Process・Interconnect・MEMS・Integration

[19p-PG3-5] A Study on Arrayed MEMS Resonant Mixers for an RF Receiver

^○Hiroyuki Ito¹, Toshifumi Konishi², Takaaki Matsushima², Daisuke Yamane¹, Noboru Ishihara¹, Katsuyuki Machida^1,2, Kazuya Masu¹ (Tokyo Tech.¹, NTT-AT²)

Keywords:MEMS,RF,受信機