The 61st JSAP Spring Meeting, 2014

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13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[19p-PG3-1~32] 13.3 Si Process・Interconnect・MEMS・Integration

Wed. Mar 19, 2014 4:00 PM - 6:00 PM PG3 (G棟2階)

4:00 PM - 6:00 PM

[19p-PG3-6] Power efficient MEMS atmospheric pressure plasma light source

Ryoto Sato1, Shinya Kumagai1, Masaru Hori2, ○Minoru Sasaki1 (Toyota Technol. Inst.1, Nagoya Univ.2)

Keywords:MEMS大気圧プラズマ源,省電力,光源