10:30 AM - 10:45 AM
△ [20a-D8-6] Visualization of depletion layer in SiC-DMOSFET using super-higher-order nonlinear dielectric microscopy
Keywords:走査型非線形誘電率顕微鏡法,SNDM,空乏層
Presentation information
Oral presentation
14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.3 Electron devices and Process technology
[20a-D8-1~11] 14.3 Electron devices and Process technology
Thu. Mar 20, 2014 9:00 AM - 12:00 PM D8 (D215)