[20a-D9-1~10] 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

[20a-D9-10] Analysis of IGBT using 3D Process and Device Simulator

^○Yasuyuki Ookura¹, Teppei Tamaki¹, Takeo Ikezawa¹, Achihiro Hamano¹, Jun'ichi Tokuya¹, Takuhito Kuwabara¹, Masanori Harada¹, Ken Yamaguchi¹, Hideaki Koike¹ (AdvanceSoft¹)

Keywords:デバイスミュレーション,プロセスシミュレーション