The 61st JSAP Spring Meeting, 2014

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13. Semiconductors A (Silicon) » 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

[20a-D9-1~10] 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

Thu. Mar 20, 2014 9:00 AM - 11:45 AM D9 (D315)

11:00 AM - 11:15 AM

[20a-D9-8] Development of Three-dimensional Process Simulator

○Shin-ichiro Kobayashi1, Teppei Tamaki1, Takeo Ikezawa1, Hideaki Koike1 (AdvanceSoft Co.1)

Keywords:TCAD,プロセス,半導体