The 61st JSAP Spring Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

[20a-D9-1~10] 13.1 Basic Properties, Surface and Interface Phenomena, and Simulation

Thu. Mar 20, 2014 9:00 AM - 11:45 AM D9 (D315)

11:15 AM - 11:30 AM

[20a-D9-9] Analysis of Narrow Channel Effect in MOSFETs using Three-dimensional TCAD Simulator

Shin-ichiro Kobayashi1, Teppei Tamaki1, Achihiro Hmano1, Takuhito Kuwabara1, Takeo Ikezawa1, Hideaki Koike1 (AdvanceSoft Co. Ltd1)

Keywords:TCAD,デバイスシミュレータ,MOSFET