[20a-E14-1~10] 13.3 Si Process・Interconnect・MEMS・Integration

[20a-E14-1] Suppressing Kirkendall Voiding by Thinning Si Nanowire

^○Kohei Takei¹, Yasuhiro Shikahama¹, Hiroki Yamashita¹, Hiroki Kosugiyama¹, Shuichiro Hashimoto¹, Jing Sun¹, Takashi Matsukawa², Meishoku Masahara², Takanobu Watanabe¹ (Waseda Univ.¹, AIST²)

Keywords:ナノワイヤ,シリサイド,シリコン